Optimization Analysis of Vibration Characteristics for Precision Positioning Stage
نویسندگان
چکیده
منابع مشابه
Positioning of Large-Scale High-Precision Stage with Vibration Suppression PTC
Abstract: In the positioning system of the large-scale high-precision stage, the primary resonance mode appears in low frequency even in the high stiffness stage. The resonance mode is a major obstacle of fast and precise positioning. In this paper, we apply vibration suppression PTC (Perfect Tracking Control) which can control the resonance mode actively on the largescale stage. Finally, simul...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2021
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/1939/1/012072